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對(duì)應(yīng)8inch Wafe的立式爐
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產(chǎn)品名稱:
對(duì)應(yīng)8inch Wafe的立式爐
產(chǎn)品型號(hào):
VF-5300
產(chǎn)品展商:
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產(chǎn)品文檔:
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簡(jiǎn)單介紹
對(duì)應(yīng)8inch Wafe的立式爐Large batch, Max 150 wafers batch processing
Max 20 cassette stocksExcellent temperature control from low to medium high temperature range by use of LGO heaterHigh-speed wafer
對(duì)應(yīng)8inch Wafe的立式爐的詳細(xì)介紹
對(duì)應(yīng)8inch Wafe的立式爐:
Large batch, Max 150 wafers batch processing
Max 20 cassette stocks
Excellent temperature control from low to medium high temperature range by use of LGO heater
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
| Outer dimension | | W900×D2300×H3250mm |
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| Heater | LGO heater(ID ø400mm) |
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| Flat zone length | 960mm |
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| Wafer size | 8inch |
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| Batch size | 150wafers |
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| I/O port | 2 |
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| Number of FOUP stock | 20(standard) |
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| Finger | 5wafers+single wafer |
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| Controller | Model VSC1000 |
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| Option | Forced-cooling system, N2 load lock,
HOST communication(HSMS/GEM),
Thin wafer (100μm or more)handling, SMIF operation |
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