產(chǎn)品[
通用量產(chǎn)型立式爐
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產(chǎn)品名稱:
通用量產(chǎn)型立式爐
產(chǎn)品型號(hào):
VF-5100
產(chǎn)品展商:
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產(chǎn)品文檔:
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簡(jiǎn)單介紹
通用量產(chǎn)型立式爐Flexible equipment configuration available for various production line50 to 150 wafers batch size can be selected
4 to 8 inch wafer size is available
4 to 8 cassette stocks
通用量產(chǎn)型立式爐的詳細(xì)介紹
通用量產(chǎn)型立式爐:
Flexible equipment configuration available for various production line
50 to 150 wafers batch size can be selected
4 to 8 inch wafer size is available
4 to 8 cassette stocks
Excellent temperature control from low to medium high temperature range by use of LGO heater
High-speed wafer transfer by use of single/five wafers handling robot
Equipped with operator friendly high performance control system
| Outer dimension | | W1250×D3200×H3400mm |
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| Heater | LGO heater(ID ø500mm) |
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| Flat zone length | 1040mm |
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| Wafer size | 300mm |
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| Batch size | 100wafers |
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| I/O port | 2 |
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| Number of FOUP stock | 16(standard) |
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| Finger | 5wafers+single wafer |
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| Controller | Model VSC1000 |
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| Option | Forced-cooling system, N2 load lock,
HOST communication(GEM300) |
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